Title:
ワーク吸着板、ワーク切断装置、ワーク切断方法、およびワーク吸着板の製造方法
Document Type and Number:
Japanese Patent JP5897686
Kind Code:
B1
Abstract:
【課題】平板状ワークの形状変形に応じてワーク吸着板を変形させて密着させて堅牢に保持する。【解決手段】記吸着面部32を、面方向内側の内域32aと面方向外側の外域32bに分け、内域32aの硬度を外域32bの硬度より低くする。【選択図】図15
Inventors:
Watanabe wound
Tsuyoshi Amagawa
Katsunori Dento
Tsuyoshi Amagawa
Katsunori Dento
Application Number:
JP2014217101A
Publication Date:
March 30, 2016
Filing Date:
October 24, 2014
Export Citation:
Assignee:
towa corporation
International Classes:
B23Q3/08; B24B41/06; B26D7/02; B28D1/22; H01L21/683
Domestic Patent References:
JP2009028889A | 2009-02-12 | |||
JPH0936599A | 1997-02-07 | |||
JP2013207051A | 2013-10-07 | |||
JP2014184502A | 2014-10-02 | |||
JP2008221391A | 2008-09-25 | |||
JP2014031286A | 2014-02-20 | |||
JP2009028889A | 2009-02-12 | |||
JPH0936599A | 1997-02-07 | |||
JP2013207051A | 2013-10-07 | |||
JPH01165166U | 1989-11-17 |
Attorney, Agent or Firm:
Kazuhide Okada
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