Title:
静電クランプ、リソグラフィ装置、および、デバイス製造方法
Document Type and Number:
Japanese Patent JP5898705
Kind Code:
B2
Inventors:
Brinkhof, Eugene
Bex, Yang
Siven, Anko
Damen, Johannes
Bex, Yang
Siven, Anko
Damen, Johannes
Application Number:
JP2013558344A
Publication Date:
April 06, 2016
Filing Date:
February 07, 2012
Export Citation:
Assignee:
AS M Netherlands B.V.
International Classes:
G03F7/20; H01L21/683
Domestic Patent References:
| JP10164877A | ||||
| JP2001358193A |
Foreign References:
| WO1996028842A1 |
Attorney, Agent or Firm:
Yoshiyuki Inaba
Toshifumi Onuki
Toshifumi Onuki