Title:
転写用マスクの製造方法
Document Type and Number:
Japanese Patent JP5900772
Kind Code:
B2
Inventors:
Suzuki Toshiyuki
Takeyuki Yamada
Takeyuki Yamada
Application Number:
JP2011213022A
Publication Date:
April 06, 2016
Filing Date:
September 28, 2011
Export Citation:
Assignee:
HOYA CORPORATION
International Classes:
G03F1/80; G03F7/32; G03F7/40; H01L21/027
Domestic Patent References:
| JP2013069840A | ||||
| JP2009300873A | ||||
| JP8160632A | ||||
| JP2006154279A | ||||
| JP2007529030A | ||||
| JP2001228628A | ||||
| JP2004279615A | ||||
| JP2003257830A | ||||
| JP63172270A |
Attorney, Agent or Firm:
Hajime Tsukuni
Yasuo Yanagibashi
Yoshinori Ikukawa
Takashi Ishioka
Yasuo Yanagibashi
Yoshinori Ikukawa
Takashi Ishioka