Title:
位置を求める方法、情報処理装置、リソグラフィ装置及び物品の製造方法
Document Type and Number:
Japanese Patent JP5922927
Kind Code:
B2
Inventors:
Tomoyuki Miyashita
Hideki Ina
Hideki Ina
Application Number:
JP2011289884A
Publication Date:
May 24, 2016
Filing Date:
December 28, 2011
Export Citation:
Assignee:
Canon Inc
International Classes:
G03F7/20; H05K3/00
Domestic Patent References:
| JP4352415A | ||||
| JP10032158A | ||||
| JP11145029A | ||||
| JP2002015980A | ||||
| JP2005322748A | ||||
| JP2006108386A | ||||
| JP2008166737A |
Attorney, Agent or Firm:
Yasunori Otsuka
Shiro Takayanagi
Yasuhiro Otsuka
Shuji Kimura
Osamu Shimoyama
Nagakawa Yukimitsu
Shiro Takayanagi
Yasuhiro Otsuka
Shuji Kimura
Osamu Shimoyama
Nagakawa Yukimitsu