Title:
ガスジェットを用いる融液の表面からのシートの取り出し
Document Type and Number:
Japanese Patent JP5961303
Kind Code:
B2
Abstract:
In one embodiment, a sheet production apparatus comprises a vessel configured to hold a melt of a material. A cooling plate is disposed proximate the melt and is configured to form a sheet of the material on the melt. A first gas jet is configured to direct a gas toward an edge of the vessel. A sheet of a material is translated horizontally on a surface of the melt and the sheet is removed from the melt. The first gas jet may be directed at the meniscus and may stabilize this meniscus or increase local pressure within the meniscus.
Inventors:
Peter El Kellerman
Gregory Dee Slonson
Sundaway
Gregory Dee Slonson
Sundaway
Application Number:
JP2015084457A
Publication Date:
August 02, 2016
Filing Date:
April 16, 2015
Export Citation:
Assignee:
Varian Semiconductor Equipment Associates, Inc.
International Classes:
C30B29/06; C30B15/06; C30B29/52
Domestic Patent References:
| JP2002114597A | ||||
| JP2001122696A |
Foreign References:
| WO2009114764A2 |
Attorney, Agent or Firm:
Kenji Sugimura
Masaaki Ishikawa
Masaaki Ishikawa