Title:
環状化合物、その製造方法、感放射線性組成物及びレジストパターン形成方法
Document Type and Number:
Japanese Patent JP6313045
Kind Code:
B2
Abstract:
A cyclic compound of the present invention has a molecular weight of 500 to 5000, and is represented by the following formula (1):
Inventors:
Echigo Masatoshi
Masako Yamakawa
Masako Yamakawa
Application Number:
JP2013544300A
Publication Date:
April 18, 2018
Filing Date:
November 14, 2012
Export Citation:
Assignee:
Mitsubishi Gas Chemical Co., Ltd.
International Classes:
C07C69/54; C07C67/14; G03F7/004; G03F7/038; H01L21/027
Domestic Patent References:
| JP200418421A | ||||
| JP200047018A | ||||
| JP2009173623A | ||||
| JP2010113117A |
Foreign References:
| WO2011024916A1 |
Other References:
FU,Q.and SHI,W.,Chemical Research in Chinese Universities,2009,Vol.25,No.5,p.760-766
HUANG,Z.and WANG,G.,Study of calixarenes.Chemische Berichte,1994,Vol.127,No.3,p.519-23
SEE,K.A.et al.,Journal of Organic Chemistry,1991,Vol.56,No.26,p7256-68
HUANG,Z.and WANG,G.,SYNTHETIC COMMUNICATIONS,24(1),1994,p.11-22
HUANG,Z.and WANG,G.,Study of calixarenes.Chemische Berichte,1994,Vol.127,No.3,p.519-23
SEE,K.A.et al.,Journal of Organic Chemistry,1991,Vol.56,No.26,p7256-68
HUANG,Z.and WANG,G.,SYNTHETIC COMMUNICATIONS,24(1),1994,p.11-22
Attorney, Agent or Firm:
Yoshiyuki Inaba
Toshifumi Onuki
Kazuhiko Naito
Toshifumi Onuki
Kazuhiko Naito
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