Title:
形状測定装置、塗布装置および形状測定方法
Document Type and Number:
Japanese Patent JP6389081
Kind Code:
B2
Abstract:
An objective lens (20) splits white light from an epi-illumination light source (12) into two light beams, irradiates one light beam onto the surface of a transparent film (3), irradiates the other light beam onto a reference mirror (24), and obtains interference light from the reflected light from both surfaces. After positioning the objective lens (20) above the transparent film (3), a control computer (40) photographs a plurality of images of the interference light while moving the transparent film (3) and objective lens (20) relative to each other vertically. The control computer (40) carries out a first processing step in which within the photography period of a CCD camera (30), image numbers are assigned to the plurality of photographed images in the order that the images were photographed, and for each of the pixels composing the images, a plurality of image numbers at which the brightness of the pixel peaks are determined, and a second processing step in which after the plurality of images are photographed, the film thickness or uneven portion height of the transparent film (3) is detected on the basis of the image numbers at which the plurality of brightnesses peak.
Inventors:
Hiroaki Ohba
Application Number:
JP2014161422A
Publication Date:
September 12, 2018
Filing Date:
August 07, 2014
Export Citation:
Assignee:
ntn corporation
International Classes:
G01B11/06; G01B11/24
Domestic Patent References:
| JP2004340680A | ||||
| JP8338709A | ||||
| JP674719A |
Foreign References:
| US20060098206 |
Attorney, Agent or Firm:
Fukami patent office