Title:
整列装置および整列方法
Document Type and Number:
Japanese Patent JP6393596
Kind Code:
B2
Abstract:
An aligning apparatus (10) comprises: a supporting means (20) for supporting a plurality of sheets (CP) by the supporting surface (21A); a partitioning means (30) for inserting the partitioning member (35) among the plurality of sheets (CP) supported by the supporting surface (21A); and an aligning means (40) for tilting at least one of the supporting surface (21A) and the partitioning means (35), and aligning each of the sheets (CP) at the predetermined positions on the supporting surface (21A) along the predetermined direction.
Inventors:
Toshiaki Mae
Naoya Okamoto
Naoya Okamoto
Application Number:
JP2014234891A
Publication Date:
September 19, 2018
Filing Date:
November 19, 2014
Export Citation:
Assignee:
LINTEC CORPORATION
International Classes:
H01L21/68; H01L21/301; H01L21/683
Domestic Patent References:
| JP2011096961A | ||||
| JP2012156288A | ||||
| JP48021418B1 | ||||
| JP64061033A |
Attorney, Agent or Firm:
Intellectual Property Office
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