Title:
吸着離脱装置
Document Type and Number:
Japanese Patent JP6398301
Kind Code:
B2
Inventors:
Hidenobu Anzai
Application Number:
JP2014098009A
Publication Date:
October 03, 2018
Filing Date:
May 09, 2014
Export Citation:
Assignee:
Fujikura Kasei Co., Ltd.
International Classes:
H01L21/683; G02F1/13; H05K13/00
Domestic Patent References:
| JP2006000930A | ||||
| JP2014232772A | ||||
| JP2012195609A | ||||
| JP2009294638A | ||||
| JP2010049048A |
Foreign References:
| WO2005098522A1 |
Attorney, Agent or Firm:
Yuichi Sudo