Title:
真空室内で微少流体を分配して構造体を形成する方法
Document Type and Number:
Japanese Patent JP6411022
Kind Code:
B2
Abstract:
Methods of dispensing a small amount of liquid onto a work piece includes in some embodiments known providing a microscopic channel for the liquid to flow from the nanodispenser. In some embodiments, dispensing the liquid includes dispensing the liquid using a nanodispenser have at least one slit extending to the tip. Some methods include controlling the rate of evaporation or the rate of liquid flow to establish an equilibrium producing a bubble of a desired size.
Inventors:
Aurelian Filippe Jean McClue Botsman
Stephen Randolph
Mark Wutroth
Stephen Randolph
Mark Wutroth
Application Number:
JP2013240123A
Publication Date:
October 24, 2018
Filing Date:
November 20, 2013
Export Citation:
Assignee:
F-I-I Company
International Classes:
B82B3/00; B23K15/00; B82Y40/00; H01J37/20; H01J37/28; H01J37/317
Domestic Patent References:
| JP2005303319A | ||||
| JP1321359A | ||||
| JP2010117363A | ||||
| JP2007232719A | ||||
| JP2008504446A | ||||
| JP2006145526A | ||||
| JP2012158831A |
Attorney, Agent or Firm:
Masahiko Amagai