Title:
粘着搬送トレイ及びその製造方法
Document Type and Number:
Japanese Patent JP6462525
Kind Code:
B2
Inventors:
Shoko Oide
Kiyofumi Tanaka
Kiyofumi Tanaka
Application Number:
JP2015158221A
Publication Date:
January 30, 2019
Filing Date:
August 10, 2015
Export Citation:
Assignee:
Shin-Etsu Polymer Co., Ltd.
International Classes:
H01L21/673
Domestic Patent References:
| JP5234644B2 | ||||
| JP2010131163A | ||||
| JP2015070109A | ||||
| JP2007242662A | ||||
| JP2013105779A | ||||
| JP2012099631A |
Foreign References:
| US20050210665 |
Attorney, Agent or Firm:
Eisuke Fujimoto
Masayoshi Kanda
Akio Miyao
Nobuyuki Baba
Masayoshi Kanda
Akio Miyao
Nobuyuki Baba
Previous Patent: 挟み込み検出装置
Next Patent: DIVISION PUMPING TESTING METHOD AND DEVICE FOR COMPLEX AQUIFER
Next Patent: DIVISION PUMPING TESTING METHOD AND DEVICE FOR COMPLEX AQUIFER