Title:
真空ポンプ用モータ駆動装置および真空ポンプ
Document Type and Number:
Japanese Patent JP6468373
Kind Code:
B2
Inventors:
Junichiro Kozaki
Application Number:
JP2018007793A
Publication Date:
February 13, 2019
Filing Date:
January 22, 2018
Export Citation:
Assignee:
SHIMADZU CORPORATION
International Classes:
H02P21/24; F04D19/04
Domestic Patent References:
| JP2009284627A | ||||
| JP2003259679A | ||||
| JP2008067581A | ||||
| JP2012120268A | ||||
| JP2010088232A |
Attorney, Agent or Firm:
Toshifumi Kita
Hiroyuki Eguchi
Hiroyuki Eguchi