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Title:
ＳｉＣエピタキシャルウェハ
Document Type and Number:
Japanese Patent JP6481790
Kind Code:
B2
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Inventors:
Yuzo Sasaki
Sugano Susumu
Application Number:
JP2018053498A
Publication Date:
March 13, 2019
Filing Date:
March 20, 2018
Export Citation:
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Assignee:
SHOWA DENKO K.K.
International Classes:
H01L21/304
Domestic Patent References:
JP2011219297A
JP2013219206A
JP2005311348A
JP2014058411A
JP2014033220A
JP2010195598A
Foreign References:
US20140073228
US20070290211
Attorney, Agent or Firm:
Shu Oikawa
Norihiko Ara
Tomoo Katsumata



 
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