ベルヌーイハンド及び半導体製造装置

Title:

ベルヌーイハンド及び半導体製造装置

Document Type and Number:

Japanese Patent JP6496919

Kind Code:

B2

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Inventors:

Yoshiyuki Takeuchi
Shogo Tsuno
Shota Maeno

Application Number:

JP2014002003A

Publication Date:

April 10, 2019

Filing Date:

January 08, 2014

Export Citation:

Assignee:

SAMCO Co., Ltd.

International Classes:

H01L21/677; B25B11/00; B65G49/07

Domestic Patent References:

Attorney, Agent or Firm:

Kyoto International Patent Office

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