Title:
アレイ型受光素子
Document Type and Number:
Japanese Patent JP6500442
Kind Code:
B2
Abstract:
An array-type light-receiving device includes a substrate including a main surface, a rear surface, and a plurality of recesses formed in the rear surface, the rear surface including an incident plane on which incident light is received; a stacked semiconductor layer disposed on the main surface of the substrate, the stacked semiconductor layer including a light-receiving layer; and a plurality of pixel regions each of which includes the light-receiving layer. The plurality of recesses are each depressed from the rear surface in a thickness direction of the substrate. In addition, each of the plurality of recesses has a bottom surface and a side surface, the bottom surface facing at least one of the plurality of pixel regions, the side surface including a tapered region inclined at a predetermined inclination angle with respect to an in-plane direction of the main surface.
Inventors:
Yasuhiro Inoguchi
Application Number:
JP2015000435A
Publication Date:
April 17, 2019
Filing Date:
January 05, 2015
Export Citation:
Assignee:
Sumitomo Electric Industries, Ltd.
International Classes:
H01L27/146; H01L31/10
Domestic Patent References:
| JP2007227546A | ||||
| JP2011146602A | ||||
| JP2002151668A | ||||
| JP2000183390A | ||||
| JP7022603A | ||||
| JP2004304187A | ||||
| JP2006080457A | ||||
| JP6077518A |
Foreign References:
| WO2004019411A1 | ||||
| US20130207212 |
Attorney, Agent or Firm:
Yoshiki Hasegawa
Yoshiki Kuroki
High Kunio Ki
Shotaro Terasawa
Yoshiki Kuroki
High Kunio Ki
Shotaro Terasawa