Title:
膜内の不純物を低減するための装置および方法
Document Type and Number:
Japanese Patent JP6546927
Kind Code:
B2
Abstract:
A plasma generator is described which employs a partial PBN liner not only to minimise the loss of energetic gas species during film formation but also to reduce boron impurity levels introduced into the growing film relative to the use of a complete PBN liner. The use of such a plasma generator in a film forming apparatus and method of forming a film is also described.
Inventors:
Man, Ian
Balik, Satyanarayan
Wintervale-Fouquet, Marie
Brown, Josh
Danigan, Paul
Balik, Satyanarayan
Wintervale-Fouquet, Marie
Brown, Josh
Danigan, Paul
Application Number:
JP2016546756A
Publication Date:
July 17, 2019
Filing Date:
January 15, 2015
Export Citation:
Assignee:
Gallium Enterprises Pty Limited
International Classes:
H05H1/46; C23C16/34; C23C16/50; C23C16/507
Domestic Patent References:
| JP2009521783A | ||||
| JP2013098172A |
Foreign References:
| US5698168 |
Attorney, Agent or Firm:
Makoto Onda
Hironobu Onda
Atsushi Honda
Hironobu Onda
Atsushi Honda