Title:
感圧センサ
Document Type and Number:
Japanese Patent JP6562357
Kind Code:
B2
Abstract:
A pressure sensor according to an aspect of the present disclosure includes: a first pressure sensitive element including a first conductive layer including first projections having conductivity, first wiring layers, and a first dielectric layer provided between the first projections and the first wiring layers; and a second pressure sensitive element including a second conductive layer including second projections having conductivity, second wiring layers, and a second dielectric layer provided between the second projections and the second wiring layers. The first pressure sensitive element and the second pressure sensitive element are stacked on each other.
Inventors:
Tetsuyoshi Obori
Keiji Noin
Shinobu Masuda
Kenichi Esaki
Keiji Noin
Shinobu Masuda
Kenichi Esaki
Application Number:
JP2016013110A
Publication Date:
August 21, 2019
Filing Date:
January 27, 2016
Export Citation:
Assignee:
Panasonic IP Management Co., Ltd.
International Classes:
G01L5/00; G01L1/14
Domestic Patent References:
| JP2013127366A | ||||
| JP2013205197A | ||||
| JP2579638B2 | ||||
| JP5896353B2 |
Foreign References:
| WO2010095581A1 | ||||
| EP0172784A2 |
Attorney, Agent or Firm:
Mitsuo Tanaka
Hiroshi Okabe
Haruhiko Ema
Hiroshi Okabe
Haruhiko Ema