Title:
被研磨物保持材及び被研磨物保持具
Document Type and Number:
Japanese Patent JP6584261
Kind Code:
B2
Inventors:
Takashi Saeki
Goro Shirota
Goro Shirota
Application Number:
JP2015193064A
Publication Date:
October 02, 2019
Filing Date:
September 30, 2015
Export Citation:
Assignee:
Fujibo Holdings Co., Ltd.
International Classes:
B24B37/30; H01L21/304; H01L21/683
Domestic Patent References:
| JP6151393A | ||||
| JP2014034100A | ||||
| JP2009214275A | ||||
| JP2010201534A | ||||
| JP2012223834A | ||||
| JP2002371121A |
Attorney, Agent or Firm:
Yoshiyuki Inaba
Toshifumi Onuki
Akihiko Eguchi
Kazuhiko Naito
Toshifumi Onuki
Akihiko Eguchi
Kazuhiko Naito