Title:
平面形状測定装置及び平面形状算出システム
Document Type and Number:
Japanese Patent JP6599137
Kind Code:
B2
Inventors:
Masayuki Nara
Application Number:
JP2015121776A
Publication Date:
October 30, 2019
Filing Date:
June 17, 2015
Export Citation:
Assignee:
Mitutoyo Corporation
International Classes:
G01B11/30
Domestic Patent References:
| JP2014153248A | ||||
| JP2012022030A |
Foreign References:
| US5269070 |
Attorney, Agent or Firm:
Ken Ieiri