Title:
熱処理用サセプタおよび熱処理装置
Document Type and Number:
Japanese Patent JP6621368
Kind Code:
B2
Inventors:
Sadao Ito
Application Number:
JP2016095447A
Publication Date:
December 18, 2019
Filing Date:
May 11, 2016
Export Citation:
Assignee:
Screen Holdings Co., Ltd.
International Classes:
H01L21/26; H01L21/683
Domestic Patent References:
| JP2015018941A | ||||
| JP2014157968A | ||||
| JP8236515A | ||||
| JP2003318183A | ||||
| JP55132939U |
Attorney, Agent or Firm:
Yoshitake Hidetoshi
Takahiro Arita
Takahiro Arita