Title:
ＭＥＭＳマイクロフォンおよびＭＥＭＳマイクロフォンの自己較正のための方法
Document Type and Number:
Japanese Patent JP6658913
Kind Code:
B2
Abstract:
In a capacitively operating MEMS microphone, by varying the BIAS voltage, the pull-in point is determined and the present pull-in voltage and the corresponding pull-in capacitance between membrane and back electrode are ascertained. From the deviation of the present pull-in point from the values of a first pull-in point, these values being determined after an end test and stored in an internal memory of the MEMS microphone, and the likewise stored values at a first operating point a recalibrated BIAS voltage is determined and set in order thereby to bring the sensitivity closer again to that at the original first operating point.
Inventors:
Walser, Sebastian
Siegel, Christian
Winter, matias
Siegel, Christian
Winter, matias
Application Number:
JP2018551366A
Publication Date:
March 04, 2020
Filing Date:
March 30, 2017
Export Citation:
Assignee:
tdk Corporation
International Classes:
H04R3/00; H04R19/04; H04R29/00
Foreign References:
| WO2015138116A1 |
Attorney, Agent or Firm:
Yoshiki Hasegawa
Yoshiki Kuroki
Takashi Mikami
Yoshiki Kuroki
Takashi Mikami