Title:
圧力センサ
Document Type and Number:
Japanese Patent JP6709486
Kind Code:
B2
Abstract:
Provided is a pressure sensor that, to suppress the influence of electrostatic noise, and the like, is made to have a conductive member with a simple structure and for which size and cost can be reduced. This pressure sensor 1 comprises: a diaphragm 50 for receiving fluid pressure; a base 40 for forming a pressure reception space 52 within which an insulating medium has been sealed between the base 40 and the diaphragm 50; a pressure detection device 60 that is disposed on the base 40 within the pressure reception space 52, detects pressure transmitted by the insulating medium, and converts the same into an electrical pressure signal; a plurality of terminal pins 70, 72 for electrically connecting the pressure detection device 60 and an external electrical circuit; and a conductive member 150 comprising a conductive plate 151 disposed so as to oppose the surface of the pressure detection device 60 and a base part 152 for supporting the conductive plate 151. At least the conductive plate 151 is electrically connected to one of the terminal pins.
Inventors:
Osamu Takatsuki
Tatsunori Kasahara
Yuta Hosaka
Taro Kanahara
Tatsunori Kasahara
Yuta Hosaka
Taro Kanahara
Application Number:
JP2020509600A
Publication Date:
June 17, 2020
Filing Date:
November 07, 2018
Export Citation:
Assignee:
Fuji Koki Co., Ltd.
International Classes:
G01L19/06; G01L9/00; G01L19/14
Domestic Patent References:
| JP6422383B2 | ||||
| JP6523762B2 | ||||
| JP6498021B2 | ||||
| JP6205145B2 | ||||
| JP6111151B2 | ||||
| JP6624966B2 | ||||
| JP3987386B2 |
Attorney, Agent or Firm:
Patent Business Corporation Daiichi International Patent Office