Title:
超伝導デバイスの製造方法
Document Type and Number:
Japanese Patent JP6740472
Kind Code:
B2
Abstract:
A method of forming a superconductor device structure is disclosed. The method comprises forming a base electrode in a first dielectric layer, forming a junction material stack over the base electrode, forming a hardmask over the junction material stack, etching away a portion of the junction material stack to form a Josephson junction (JJ) over the base electrode, and depositing a second dielectric layer over the hardmask, the JJ, the base electrode and the first dielectric layer. The method additionally comprises forming a first contact through the second dielectric layer to the base electrode to electrically couple the first contact to a first end of the JJ, and forming a second contact through the second dielectric layer and the hardmask to electrically coupled the second contact to a second end of the JJ.
Inventors:
Kirby, Christopher F.
Lenny, Michael
O'Donnell, Daniel Jay.
Lenny, Michael
O'Donnell, Daniel Jay.
Application Number:
JP2019521826A
Publication Date:
August 12, 2020
Filing Date:
October 26, 2017
Export Citation:
Assignee:
NORTHROP GRUMMAN SYSTEMS CORPORATION
International Classes:
H01L39/24
Domestic Patent References:
| JP2002299705A | ||||
| JP2012519379A | ||||
| JP2002043640A | ||||
| JP3190289A | ||||
| JP6334231A | ||||
| JP2015511067A |
Attorney, Agent or Firm:
Makoto Onda
Hironobu Onda
Atsushi Honda
Hironobu Onda
Atsushi Honda