Title:
ガス除去方法
Document Type and Number:
Japanese Patent JP6744377
Kind Code:
B2
Abstract:
A precision pump system is described that includes a motor driver for accurately and repeatedly delivering process fluid, and uses a pumping fluid with minimal process fluid loss to a fabrication process. A method for automatically evacuating gas from the process fluid to be dispensed as part of a recirculation process is also described.
Inventors:
Vinesse Johnsea.
Laesle John
Laesle John
Application Number:
JP2018202891A
Publication Date:
August 19, 2020
Filing Date:
October 29, 2018
Export Citation:
Assignee:
Teledyne Digital Imaging US, Inc.
International Classes:
B01D19/00
Domestic Patent References:
| JP2004508183A | ||||
| JP2006234430A | ||||
| JP59019982U |
Foreign References:
| US7029238 |
Attorney, Agent or Firm:
Ken Ieiri