Title:
研磨用組成物
Document Type and Number:
Japanese Patent JP6761554
Kind Code:
B1
Abstract:
【課題】新規な研磨用組成物を提供する。【解決手段】水溶性高分子を含む研磨用組成物であって、水溶性高分子が、２０℃における４％水溶液粘度が１５ｍＰａ・ｓ以上のビニルアルコール系樹脂を少なくとも含む研磨用組成物。【選択図】なし
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Inventors:
Takashi Murakami
Yoshihiro Kimura
Yoshihiro Kimura
Application Number:
JP2020027613A
Publication Date:
September 23, 2020
Filing Date:
February 20, 2020
Export Citation:
Assignee:
Japan Vinegar Poval Co., Ltd.
International Classes:
C09K3/14; B24B37/00; C08K3/36; C08L29/04; C08L71/02; H01L21/304
Domestic Patent References:
| JP2009094233A |
Attorney, Agent or Firm:
Ryu Iwatani