Title:
解析方法、解析プログラム、および解析装置
Document Type and Number:
Japanese Patent JP6792859
Kind Code:
B2
Abstract:
PROBLEM TO BE SOLVED: To provide an analysis method, an analysis program and an analyzer which enable characteristics of an analysis object to be easily and accurately analyzed.SOLUTION: The analysis method is provided that comprises: exciting an analysis object by applying an AC electric signal at a first frequency to a first coil to generate a first eddy current in the analysis object; measuring a first electric state quantity corresponding to a voltage generated in a second coil by a magnetic field formed due to the first eddy current; exciting the analysis object by applying an AC electric signal at a second frequency to the first coil to generate a second eddy current in the analysis object; measuring a second electric state quantity corresponding to a voltage generated in the second coil by a magnetic field formed due to the second eddy current; and analyzing thickness-direction characteristics of the analysis object on the basis of the first electric state quantity and the second electric state quantity.SELECTED DRAWING: Figure 10
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Inventors:
Eiichi Sasaki
Hiroshi Tamura
Yuki Ebisawa
Yusuke Kobayashi
Koichi Takeya
Ayatsu Ayako
Suganuma Hisada
Atsushi Tanabe
Hiroshi Tamura
Yuki Ebisawa
Yusuke Kobayashi
Koichi Takeya
Ayatsu Ayako
Suganuma Hisada
Atsushi Tanabe
Application Number:
JP2016156441A
Publication Date:
December 02, 2020
Filing Date:
August 09, 2016
Export Citation:
Assignee:
National University Corporation Tokyo Institute of Technology
International Classes:
G01N27/72; G01B7/06; G01N27/90
Domestic Patent References:
JP63139202A | ||||
JP2009186367A | ||||
JP2011185623A | ||||
JP59054903A | ||||
JP2001235449A | ||||
JP2007327924A | ||||
JP2015169644A | ||||
JP2003240504A | ||||
JP2015099043A | ||||
JP58163806U |
Foreign References:
US5889401 |
Attorney, Agent or Firm:
Sumio Tanai
Kazunori Onami
Shunsuke Fushimi
Nishizawa Kazumi
Kazunori Onami
Shunsuke Fushimi
Nishizawa Kazumi