Title:
測定装置
Document Type and Number:
Japanese Patent JP6814640
Kind Code:
B2
Abstract:
PROBLEM TO BE SOLVED: To reduce vibration that affects measurement, with a simple mechanism.SOLUTION: A measuring device (1) comprises: a measuring apparatus (10) including a table (20) on which work (W) to be measured is placed, a microscope (61) that measures the work placed on the table, from above, moving means (30) that moves the table in X, Y, and Z directions, and a base (11) on which the microscope and the moving means are arranged; and vibration isolation means 70 that eliminates a frequency band of vibration that affects measurement of the measuring apparatus. The vibration isolation means comprises a frame (74) that covers the measuring apparatus, and four hanging parts (75) that hang the measuring apparatus from the frame at four places in a radial direction with a center of gravity of the measuring apparatus as a center. The hanging parts comprises springs (75a).SELECTED DRAWING: Figure 1
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Inventors:
Yusaku Ito
Application Number:
JP2017001787A
Publication Date:
January 20, 2021
Filing Date:
January 10, 2017
Export Citation:
Assignee:
Disco Co., Ltd.
International Classes:
F16F15/067
Domestic Patent References:
| JP2009071273A | ||||
| JP2016075375A | ||||
| JP46026700Y1 | ||||
| JP10062139A | ||||
| JP59077640U |
Attorney, Agent or Firm:
Hiroyoshi Aoki
Amada Masayuki
Amada Masayuki