Title:
放電ランプ、放電ランプの交換方法、光源装置、露光装置、露光方法、およびデバイス製造方法
Document Type and Number:
Japanese Patent JP6859957
Kind Code:
B2
Abstract:
A discharge lamp is provided with a glass tube having an electrode for forming a light-emitting part provided therein, and a base provided at the end part of the glass tube. A light source device is provided with an emission unit for beaming a light beam into the through hole of the base of the discharge lamp, a light-receiving unit for detecting the light beam having passed through the through hole, and a light source control system for obtaining the angle of the discharge lamp using the result of the detection by the light-receiving unit. States of the discharge lamp, such as the rotation angle or whether or not the discharge lamp has already been used, can be easily verified.
Inventors:
Yasuo Aoki
Application Number:
JP2017555160A
Publication Date:
April 14, 2021
Filing Date:
December 09, 2016
Export Citation:
Assignee:
NIKON CORPORATION
International Classes:
G03F7/20; H01J61/56
Domestic Patent References:
| JP2012114390A | ||||
| JP2009251246A | ||||
| JP2007273382A | ||||
| JP2004006360A | ||||
| JP11111231A | ||||
| JP11054090A |
Attorney, Agent or Firm:
Fuyuki Nagai
Naomasa Shiraishi
Satoshi Omori
Naomasa Shiraishi
Satoshi Omori