Title:
インプリント装置、および物品製造方法
Document Type and Number:
Japanese Patent JP6882027
Kind Code:
B2
Abstract:
PROBLEM TO BE SOLVED: To provide an imprint device advantageous in superposition accuracy.SOLUTION: An imprint device for patterning an imprint material on a substrate by using a die has a die holder for holding the die, a shape correction mechanism for correcting a shape of the die held on the die holder by applying force to a side of the die, a movable support for supporting the die holder and the shape correction mechanism, and a flexure interposed between the movable support and the die holder, and deforms elastically as the movable support deforms. The shape correction mechanism has a press member in contact with the side of the die and pressing the side of the die, and a guide fixed to the die holder, supports the press member movably in a pressing direction, i.e., the direction of pressing the side of the die, and regulates movement in a direction different from the pressing direction.SELECTED DRAWING: Figure 2
Inventors:
Torii Hirotoshi
Application Number:
JP2017051706A
Publication Date:
June 02, 2021
Filing Date:
March 16, 2017
Export Citation:
Assignee:
Canon Inc
International Classes:
H01L21/027; B29C59/02
Domestic Patent References:
| JP2008504141A | ||||
| JP2013254938A | ||||
| JP2017005035A | ||||
| JP2014225639A | ||||
| JP2015090974A |
Attorney, Agent or Firm:
Patent Business Corporation Otsuka International Patent Office