Title:
ラインセンサの位置調整方法
Document Type and Number:
Japanese Patent JP6882954
Kind Code:
B2
Abstract:
To simply and accurately perform a position adjustment of a licensor.SOLUTION: A position adjustment method of a licensor arranges a mark 19 at a position deviated to a diameter direction from a center of a holding surface 21 of a holding table 20 by mounting a circular-plate jig 18 attached with the mark 19 on the holding surface 21. The licensor 2 and the holding table 20 are relatively moved so that the mark 19 crosses directly below a licensor 2 and the mark 19 is imaged on two places of the imaged image when the holding table 20 is rotated once, and after that, the holding table 20 is rotated to image the mark 19, and from an angle (θ) with a rotary shaft O as a center of the two imaged marks 19 and the distance (X) in the X direction of the two marks 19, a deviated distance (y) in the y direction between the rotary shaft center O and the imaging part 3 is calculated. The licensor 2 and the holding table 20 are relative moved in the y direction by the calculated deviated distance (y), and the position adjustment is performed so that the imaging can be performed over the rotary shaft center of the holding table 20.SELECTED DRAWING: Figure 5
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Inventors:
Manabu Takahashi
Application Number:
JP2017154013A
Publication Date:
June 02, 2021
Filing Date:
August 09, 2017
Export Citation:
Assignee:
Disco Co., Ltd.
International Classes:
G01N21/956; G01B11/30
Domestic Patent References:
| JP2016075554A | ||||
| JP2001336926A | ||||
| JP8159722A | ||||
| JP2011117916A | ||||
| JP2006012907A | ||||
| JP2010021485A | ||||
| JP10223732A |
Foreign References:
| US20090130784 |
Attorney, Agent or Firm:
Patent Business Corporation Tokyo Alpa Patent Office