Title:
レジスト除去用組成物
Document Type and Number:
Japanese Patent JP6899220
Kind Code:
B2
Abstract:
wherein n represents the number of the repeating units, and is an integer of 2 to 60; and Ra identically or differently represents a hydrogen atom, a C1-18 hydrocarbon group or a C2-24 acyl group, provided that at least two of the (n+2) number of Ra are C1-18 hydrocarbon groups and/or C2-24 acyl groups.
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Inventors:
Yuichi Sakanishi
Application Number:
JP2017002539A
Publication Date:
July 07, 2021
Filing Date:
January 11, 2017
Export Citation:
Assignee:
Daicel Corporation
International Classes:
G03F7/42
Domestic Patent References:
| JP2004217814A | ||||
| JP2003119494A | ||||
| JP2016033198A | ||||
| JP2000063895A |
Attorney, Agent or Firm:
Goto Patent Office