Title:
研磨材とその製造方法
Document Type and Number:
Japanese Patent JP6905355
Kind Code:
B2
Abstract:
PROBLEM TO BE SOLVED: To provide a polishing material made of sunflower-like particles, which has a faster polishing speed and less scratch.SOLUTION: A polishing material that has a surface of base particle covered with fine particles, is made of inorganic oxide particles (also called as sunflower-like particles) having a sunflower-like cross section in which irregularity due to the fine particles is formed on a surface, has a fine particle lower part firmly fixed to the surface of base particles by a resin adhesion part of a recess part, and has an upper part of the fine particles that form a projection part not covered with the resin adhesion part, and a production method thereof.SELECTED DRAWING: Figure 1
Inventors:
Kumazawa Mitsuaki
Satoshi Yoshida
Komatsudori
Satoshi Yoshida
Komatsudori
Application Number:
JP2017038727A
Publication Date:
July 21, 2021
Filing Date:
March 01, 2017
Export Citation:
Assignee:
JGC Catalysts Co., Ltd.
International Classes:
C09K3/14; B24B37/00; B24D3/00; H01L21/304
Domestic Patent References:
| JP59227970A | ||||
| JP2002346908A | ||||
| JP2007268686A | ||||
| JP2015063451A |
Attorney, Agent or Firm:
Hiroshi Chiba