Title:
ランダムマイクロニードル
Document Type and Number:
Japanese Patent JP6910047
Kind Code:
B2
Abstract:
PROBLEM TO BE SOLVED: To provide an inexpensive ground substrate capable of rearing a high-quality diamond single crystal, while reducing warpage.SOLUTION: By using a random microneedle constituted of a diamond single crystal, a ground substrate for growing a diamond single crystal substrate can be formed inexpensively only by thermal processing without using photo-lithography requiring a laser exposure device or the like, and a high-quality diamond single crystal can be vapor-grown by using the ground substrate.SELECTED DRAWING: Figure 2
Inventors:
Aida Hideo
Seisuke Kim
Fujii Daiki
Kenjiro Ikejiri
Kawamata Tomoki
Yoichi Yaguchi
Seisuke Kim
Fujii Daiki
Kenjiro Ikejiri
Kawamata Tomoki
Yoichi Yaguchi
Application Number:
JP2016199374A
Publication Date:
July 28, 2021
Filing Date:
October 07, 2016
Export Citation:
Assignee:
Adamant Namiki Precision Jewel Co., Ltd.
International Classes:
C30B29/04; C01B32/26; C23C16/02; C23C16/27; H01L21/205
Domestic Patent References:
| JP2001348296A | ||||
| JP2010059044A | ||||
| JP2006335591A |
Foreign References:
| WO2015046294A1 |