Title:
水素センサ、水素検出方法およびプログラム
Document Type and Number:
Japanese Patent JP6926040
Kind Code:
B2
Abstract:
According to one embodiment, a hydrogen sensor is disclosed. The hydrogen sensor includes a capacitor, a gas detector, a heater, and a determiner. The capacitor includes a deformable member that deforms by absorbing or adsorbing hydrogen and varies a capacitance value corresponding to a deformation of the deformable member. The gas detector detects gas based on a capacitance value of the capacitor. The heater heats the deformable member. The determiner determines whether gas detected by the gas detector contains a substance other than hydrogen or not, wherein the gas detector detects the gas during a heating period during which the heater heats the deformable member.
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Inventors:
Hiroaki Yamazaki
Application Number:
JP2018168890A
Publication Date:
August 25, 2021
Filing Date:
September 10, 2018
Export Citation:
Assignee:
Toshiba Corporation
International Classes:
G01N27/22; G01N25/22; G01N27/16; G01N27/18
Domestic Patent References:
| JP2017215170A | ||||
| JP7174725A | ||||
| JP2014190878A | ||||
| JP2008185333A |
Foreign References:
| US20170343522 | ||||
| KR1020050005899A | ||||
| WO2018135100A1 |
Attorney, Agent or Firm:
Suzue International Patent Office