Title:
保持パッド及びその製造方法
Document Type and Number:
Japanese Patent JP6940363
Kind Code:
B2
Abstract:
A holding pad comprising a resin sheet which has a holding surface for holding an object to be polished, wherein the penetration speed, expressed in formula (1), of ethanol into the holding surface is 1.0 to 2.0 deg/s. (1): penetration speed = (C0-C20)/20. C0 is the contact angle of ethanol in relation to the holding surface immediately after a droplet of ethanol has fallen onto the holding surface, and C20 is the contact angle of ethanol in relation to the holding surface 20 seconds after the droplet of ethanol has fallen.
Inventors:
Hiroshi Yuki
Toshihide Maeda
Takahiro Kume
Toshihide Maeda
Takahiro Kume
Application Number:
JP2017197075A
Publication Date:
September 29, 2021
Filing Date:
October 10, 2017
Export Citation:
Assignee:
Fujibo Holdings Co., Ltd.
International Classes:
B24B37/30; H01L21/304
Domestic Patent References:
| JP2008168380A | ||||
| JP2016039180A | ||||
| JP2014079878A | ||||
| JP2011011304A | ||||
| JP2012071399A | ||||
| JP2016055385A |
Attorney, Agent or Firm:
Yoshiyuki Inaba
Toshifumi Onuki
Akihiko Eguchi
Kazuhiko Naito
Toshifumi Onuki
Akihiko Eguchi
Kazuhiko Naito