Title:
真空ポンプ用電源装置および真空ポンプ装置
Document Type and Number:
Japanese Patent JP6954238
Kind Code:
B2
Abstract:
The utility model provides a power supply device for a vacuum pump and the vacuum pump device, the power supply device for the vacuum pump can reduce the size of a frame body of a power supply devicebody or the cost of the power supply device, and the power supply device body is provided with a power supply part or a control part of a pump body. A power supply device (20) is provided with: a first housing (201); a control unit (211) that houses a pump body (10); and a power supply unit (210). A second housing (202), which is attached to the first housing (201) so as to protrude from the firsthousing (201), and which has a circuit housing space (202S) that communicates with the internal space of the first housing (201); a communication circuit (220) housed in the circuit housing space (202S), connected to at least one of the power supply unit (210) and the control unit (211), and also connected to a main control device (1000), which is an external device; and connectors (221, 222) that are provided on the outer peripheral surface of the second housing (202) and connect the communication circuit (220) to the main control device (1000).
Inventors:
Nobuyuki Hirata
Application Number:
JP2018127786A
Publication Date:
October 27, 2021
Filing Date:
July 04, 2018
Export Citation:
Assignee:
SHIMADZU CORPORATION
International Classes:
F04D19/04
Domestic Patent References:
| JP2008196463A | ||||
| JP200869661A | ||||
| JP10131887A | ||||
| JP4104196U |
Foreign References:
| WO2008062598A1 | ||||
| GB2553321A |
Attorney, Agent or Firm:
Yamashita