Title:
荷電粒子線装置および画像調整方法
Document Type and Number:
Japanese Patent JP7369747
Kind Code:
B2
Abstract:
Provided is a charged particle beam apparatus (100) that acquires an image by scanning a specimen with a charged particle beam, and includes: a contrast adjustment circuit (42) that adjusts contrast of the image (e.g. via the gain of a detector (40)); a brightness adjustment circuit (50) that adjusts brightness of the image (e.g. via an adder (52) adding an offset to the preamplifier (54) input); and a control unit that (70) controls the contrast adjustment circuit (42) and the brightness adjustment circuit (50). The control unit (70) acquires information on luminance of a reference image in a non-signal state, and information on an average value of luminance of each pixel of a reference image, controls the brightness adjustment circuit, based on the acquired information on luminance of the reference image in a non-signal state, acquires the image in a state where the brightness adjustment circuit (50) is controlled, and adjusts the contrast of the acquired image by controlling the contrast adjustment circuit (42), based on the average value of luminance of each pixel of the reference image.
Inventors:
Tomohiro Sampei
Application Number:
JP2021155341A
Publication Date:
October 26, 2023
Filing Date:
September 24, 2021
Export Citation:
Assignee:
JEOL Ltd.
International Classes:
H01J37/22; H01J37/244; H01J37/317
Domestic Patent References:
| JP3046743A | ||||
| JP2014053086A | ||||
| JP2008282761A | ||||
| JP2006073525A | ||||
| JP2005026192A | ||||
| JP2001243907A | ||||
| JP2007047060A |
Foreign References:
| US20210192700 |
Attorney, Agent or Firm:
Yukio Fuse
Michie Obuchi
Yoshinobu Yoshida
Michie Obuchi
Yoshinobu Yoshida