Title:
研磨パッドの製造方法
Document Type and Number:
Japanese Patent JP7436776
Kind Code:
B2
Abstract:
To provide an abrasive pad exerting stable abrasive performance by uniforming the diameter of bubbles formed in an abrasive layer.SOLUTION: There is provided an abrasive pad comprising an abrasive layer consisting of rigid polyurethane in which numerous bubbles derived from hollow microspheres are formed. The volume percentage of the bubbles derived from the hollow microsphere occupied in total volume of bubbles formed in the abrasive layer is 90% or more. Since numerous bubbles derived from the hollow microspheres are formed in the abrasive layer to enable lessening the large pit which is not derived from the hollow microspheres, the deterioration of an abrasive performance resulting from the pit or scratch flaw can be prevented.SELECTED DRAWING: Figure 1
Inventors:
Tatsuma Matsuoka
Hiroshi Kurihara
Satsuki Narushima
Hiroshi Kurihara
Satsuki Narushima
Application Number:
JP2019067951A
Publication Date:
February 22, 2024
Filing Date:
March 29, 2019
Export Citation:
Assignee:
Fujibo Holdings Co., Ltd.
International Classes:
B24B37/24; C08G18/00; H01L21/304
Domestic Patent References:
| JP2010274362A | ||||
| JP2018024061A | ||||
| JP2016074044A | ||||
| JP2002194104A | ||||
| JP2017064891A | ||||
| JP2009208165A |
Attorney, Agent or Firm:
Makoto Kanzaki