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Patent Searching and Data


Document Type and Number:
Japanese Patent JPH01109200
Kind Code:
U
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Application Number:
JP367588U
Publication Date:
July 24, 1989
Filing Date:
January 14, 1988
Export Citation:
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International Classes:
H05H1/46; H01L21/302; H01L21/3065; H01P1/30; (IPC1-7): H05H1/46; H01L21/302; H01P1/30



 
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