Document Type and Number:
Japanese Patent JPH02131256
Kind Code:
U
Application Number:
JP4011589U
Publication Date:
October 31, 1990
Filing Date:
April 04, 1989
Export Citation:
International Classes:
H01J37/063; H01L21/265; (IPC1-7): H01J37/063; H01L21/265
Domestic Patent References:
| JPS62137548U | 1987-08-29 |