Document Type and Number:
Japanese Patent JPH03121600
Kind Code:
U
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Application Number:
JP3121890U
Publication Date:
December 12, 1991
Filing Date:
March 27, 1990
Export Citation:
International Classes:
G01R31/28; G11C29/00; G11C29/04; H01L21/66; (IPC1-7): G11C29/00; G01R31/28; G01R31/318; G11C29/00; H01L21/66