Document Type and Number:
Japanese Patent JPH0314222
Kind Code:
Y2
Application Number:
JP8997284U
Publication Date:
March 29, 1991
Filing Date:
June 15, 1984
Export Citation:
International Classes:
B24B31/16; A63F7/02; (IPC1-7): A63F7/02; B24B31/16
Next Patent: ECR PLASMA CVD DEVICE