Title:
【発明の名称】レーザビームを用いてワーク表面を微細加工する方法
Document Type and Number:
Japanese Patent JPH03501364
Kind Code:
A
Abstract:
PCT No. PCT/NL89/00050 Sec. 371 Date Nov. 8, 1990 Sec. 102(e) Date Nov. 8, 1990 PCT Filed Jun. 16, 1989 PCT Pub. No. WO89/12525 PCT Pub. Date Dec. 28, 1989.A micro-working of the surface is obtained by focussing a laser beam on a surface of a workpiece and subjecting the laser beam and the workpiece to a relative reciprocating movement in which material evaporates from the surface while forming a plasma plume. The relative movement of the laser beam and the workpiece occurs in steps smaller than the diameter of the focus of the laser beam, so that the laser beam moves over the same piece of surface area in an overlapping manner and radiates the same.
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Inventors:
Fun Krieken Aha
Floate Suhlsberg Yehm
De Langhe Way
Floate Suhlsberg Yehm
De Langhe Way
Application Number:
JP50673689A
Publication Date:
March 28, 1991
Filing Date:
June 16, 1989
Export Citation:
Assignee:
Philips Electronics Nemrose Fennaught Shap
International Classes:
B23K26/08; B23K26/00; B23K26/36; (IPC1-7): B23K26/00
Attorney, Agent or Firm:
Akihide Sugimura (1 outside)