Document Type and Number:
Japanese Patent JPH0451358
Kind Code:
U
Application Number:
JP9446090U
Publication Date:
April 30, 1992
Filing Date:
September 07, 1990
Export Citation:
International Classes:
B24B37/30; B24B37/32; H01L21/304; H01L21/68; H01L21/683; (IPC1-7): B24B37/04; H01L21/304; H01L21/68
Next Patent: JPH0451359