Document Type and Number:
Japanese Patent JPH0471294
Kind Code:
B2
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Inventors:
SUGIMOTO HISAE
MAEDA SHIGEAKI
MAEDA SHIGEAKI
Application Number:
JP1143583A
Publication Date:
November 13, 1992
Filing Date:
January 28, 1983
Export Citation:
Assignee:
TOKYO SHIBAURA ELECTRIC CO
International Classes:
H01J9/42; H01L21/302
Next Patent: MANUFACTURE OF CERAMIC MULTILAYER WIRING BOARD