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Title:
【発明の名称】固体上の薄フィルムの付着方法
Document Type and Number:
Japanese Patent JPH05501480
Kind Code:
A
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Inventors:
Fard, John Stewart
OHARA, Dermot
Application Number:
JP50133791A
Publication Date:
March 18, 1993
Filing Date:
December 17, 1990
Export Citation:
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Assignee:
ISIS INNOVATION LIMITED
International Classes:
C23C16/18; C23C16/30; C30B23/08; C30B25/02; C30B29/40; H01L21/203; H01L21/205; (IPC1-7): C23C16/30; C30B23/08; C30B25/02; C30B29/40; H01L21/203; H01L21/205
Attorney, Agent or Firm:
Hasegawa Moji



 
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