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Document Type and Number:
Japanese Patent JPH0581089
Kind Code:
B2
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Inventors:
KAWANA KEIICHI
Application Number:
JP4146888A
Publication Date:
November 11, 1993
Filing Date:
February 24, 1988
Export Citation:
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Assignee:
KAWASAKI STEEL CO
International Classes:
H01L21/822; H01L21/82; H01L27/04; H03F3/34; H03F3/347; H03K19/173; (IPC1-7): H03K19/173; H01L21/82; H03F3/34



 
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