Title:
【考案の名称】原稿装着装置
Document Type and Number:
Japanese Patent JPH0590485
Kind Code:
U
Inventors:
Mizuno Yuji
Application Number:
JP3443592U
Publication Date:
December 10, 1993
Filing Date:
April 24, 1992
Export Citation:
Assignee:
Dainippon Screen Mfg. Co., Ltd.
International Classes:
G03B27/62; (IPC1-7): G03B27/62
Attorney, Agent or Firm:
Takao Igarashi (1 outside)
Next Patent: 走査型露光装置の平面ミラ−保持構造