Title:
【考案の名称】ウエハ洗浄用治具
Document Type and Number:
Japanese Patent JPH0686335
Kind Code:
U
Inventors:
Yoshiaki Honda
Application Number:
JP2876093U
Publication Date:
December 13, 1994
Filing Date:
May 31, 1993
Export Citation:
Assignee:
MATSUSHITA ELECTRIC WORKS,LTD.
International Classes:
H01L21/304; (IPC1-7): H01L21/304
Attorney, Agent or Firm:
Shigeji Sato (1 person outside)
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