Title:
【発明の名称】単結晶の引上方法
Document Type and Number:
Japanese Patent JPH0699228
Kind Code:
B2
Inventors:
Toshihiro Kotani
Application Number:
JP13242086A
Publication Date:
December 07, 1994
Filing Date:
June 06, 1986
Export Citation:
Assignee:
Sumitomo Electric Industries, Ltd.
International Classes:
C30B15/24; C30B27/02; H01L21/18; H01L21/208; (IPC1-7): C30B15/24; C30B27/02; H01L21/18
Domestic Patent References:
| JP6259594A | ||||
| JP57200286A | ||||
| JP5934679B2 |
Attorney, Agent or Firm:
Tetsuji Ueshiro
Next Patent: 単結晶の製造方法